Junko Maekawa

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 3:00 PM - 6:45 PM CE (Century Hall)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[19p-CE-5~17] 13.7 Compound and power electron devices and process technology

5:45 PM - 6:00 PM

[19p-CE-14] Damage characterization of GaN substrate with hot implant process by TEM(２)

〇Junko Maekawa¹, Hitoshi Kawanowa¹, Masahiko Aoki¹, Katsumi Takahiro², Toshiyuki Isshiki² (1.Ion Technology Center Co.,Ltd, 2.Kyoto Institute of Technology)

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