Kiyotaka Fukuda

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 3:00 PM - 6:45 PM CE (Century Hall)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[19p-CE-5~17] 13.7 Compound and power electron devices and process technology

6:00 PM - 6:15 PM

[19p-CE-15] Evaluation of Mg ion implanted GaN by photothermal deflection spectroscopy

〇Kiyotaka Fukuda^1,2, Shinya Takashima³, Takeyoshi Onuma², Tomohiro Yamaguchi², Tohru Honda², Akira Uedono⁴, Masatomo Sumiya¹ (1.NIMS, 2.Kogakuin Univ., 3.Fuji Electric Co. Ltd., 4.Tsukuba Univ.)

6:15 PM - 6:30 PM

△ [19p-CE-16] Evaluation of Al₂O₃ /n-, p-GaN samples by photothermal deflection spectroscopy

〇Kiyotaka Fukuda^1,2, Yuya Asai³, Keisuke Seki⁴, Liwen Sang¹, Akitaka Yoshigoe⁵, Akira Uedono³, Takamasa Ishigaki⁴, Takeyoshi Onuma², Tomohiro Yamaguchi², Tohru Honda², Masatomo Sumiya¹ (1.NIMS, 2.Kogakuin Univ., 3.Tsukuba Univ., 4.Hosei Univ., 5.JAEA)

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