1:30 PM - 2:00 PM
▲ [19p-CE-2] Crystal plane dependence of interface states density in c- and m-plane GaN MOS capacitors
〇Manato Deki1, Yuto Ando2, Hirotaka Watanabe1, Atsushi Tanaka1,3, Maki Kushimoto2, Shugo Nitta1, Yoshio Honda1, Hiroshi Amano1,4,5 (1.IMaSS Nagoya Univ., 2.Nagoya Univ., 3.NIMS, 4.ARC, 5.Nagoya Univ. VBL)