Naoki Nishioka

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 11:45 AM 224A (224-1)

Oral presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[20a-224A-1~10] 3.7 Laser processing

9:30 AM - 9:45 AM

[20a-224A-3] Time-resolved Analysis of Resist Stripping Phenomenon Using Laser Irradiation

〇(B)Naoki Nishioka^1,2, Yuji Umeda¹, Yusuke Hunamoto¹, Daichi Shima¹, Hiroyuki Kuramae¹, Tomosumi Kamimura¹, Hideo Horibe³, Masashi Yoshimura², Ryosuke Nakamura² (1.Osaka Inst Tech Univ., 2.Osaka Univ., 3.Osaka City Univ.)

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