Hiroyuki Iwata

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 11:45 AM 224A (224-1)

Oral presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[20a-224A-1~10] 3.7 Laser processing

9:45 AM - 10:00 AM

[20a-224A-4] TEM Analysis of Crystalline Defects Induced in Si by Stealth Dicing

〇Hiroyuki Iwata¹, Hiroyasu Saka², Daisuke Kawaguchi² (1.Aichi Inst. of Tech., 2.Hamamatsu Photonics)