Shinya Goya

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 12:00 PM 225B (2Ｆ_Lounge2)

Oral presentation
| Code-sharing session
| 【CS.4】 Code-sharing Session of 3.11 & 3.12

[20a-225B-1~11] 【CS.4】 Code-sharing Session of 3.11 & 3.12

10:45 AM - 11:00 AM

△ [20a-225B-7] Suppression of Thermal Oxidation of TiN Nanocylinder Arrays by Atomic Layer Deposition of Refractory Dielectric Layers

〇(M1)Shinya Goya¹, Shunsuke Murai¹, Koji Fujita¹, Katsuhisa Tanaka¹ (1.Kyoto Univ.)