Yusuke Fukunaga

→ Search for Yusuke Fukunaga in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 12:00 PM 437 (437)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma nanotechnology

[20a-437-1~11] 8.3 Plasma nanotechnology

11:15 AM - 11:30 AM

△ [20a-437-9] Organic high aspect pattern formation with 10 nm line width by controlled plasma process

〇Yusuke Fukunaga¹, Takayoshi Tsutsumi¹, Kenji Ishikawa¹, Hiroki Kondo¹, Makoto Sekine¹, Masaru Hori² (1.Nagoya Univ., 2.Nagoya Univ. Inst. Innovation for Future Society)

▲