Hiroyuki Yoshiki

→ Search for Hiroyuki Yoshiki in Google Scholar

Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:00 AM - 12:15 PM 438 (3F_Lounge)

Oral presentation
| 8 Plasma Electronics
| 8.2 Plasma deposition of thin film, plasma etching and surface treatment

[20a-438-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

10:45 AM - 11:00 AM

[20a-438-7] The Effect of Sub. Temperature and H₂ Addition on DLC Films Deposited by an APμPlasma

〇Hiroyuki Yoshiki¹, Junki Sato¹, Kousuke Gando^1,2 (1.Tsuruoka NCT, 2.Canon Inc.)