Kentaro Yoshioka

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PA (Event Hall)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7 Beam Technology and Nanofabrication (7.1～7.5) (Poster)

[20a-PA1-1~11] 7 Beam Technology and Nanofabrication (Poster)

9:30 AM - 11:30 AM

[20a-PA1-7] Change in Extracted Ion Species due to Operation History of a Plasma-Sputter-Type Ion Source

〇Kentaro Yoshioka¹, Takeshi Sakamoto¹, Toshiro Kasuya¹, Motoi Wada¹ (1.Doshisha Univ.)