Sho Masuda

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 9:30 AM - 11:30 AM PA (Event Hall)

Poster presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[20a-PA6-1~9] 15.7 Crystal characterization, impurities and crystal defects

9:30 AM - 11:30 AM

[20a-PA6-5] Evaluation of Si SJ-MOSFET by multifunctional scanning probe microscope

〇(M1)Sho Masuda¹, Yuki Uchida¹, Atsushi Doi¹, Nobuo Satoh¹, Hidekazu Yamamoto¹ (1.Chiba Inst. of Tech.)