Akira Toriumi

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:30 PM - 6:30 PM 141 (141+142)

Symposium (Oral)
| Symposium
| Trends of ferroelectric HfO₂ technologies

[20p-141-1~13] Trends of ferroelectric HfO₂ technologies

2:30 PM - 3:00 PM

[20p-141-3] Why HfO₂ thin films exhibit ferroelectric properties?

〇Akira Toriumi¹, Shinji Migita² (1.Univ. Tokyo, 2.AIST)