Yukihiro Shimogaki

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 6:45 PM 223 (223)

Symposium (Oral)
| Symposium
| Current status and future prospect of atomic layer processes

[20p-223-1~11] Current status and future prospect of atomic layer processes

1:45 PM - 2:15 PM

[20p-223-1] Chemical reaction engineering of ALD/CVD processes

〇Yukihiro Shimogaki¹ (1.The Univ. Tokyo)