Masaki Hasegawa

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 6:45 PM 223 (223)

Symposium (Oral)
| Symposium
| Current status and future prospect of atomic layer processes

[20p-223-1~11] Current status and future prospect of atomic layer processes

6:15 PM - 6:30 PM

△ [20p-223-10] In-situ analysis of chlorine adsorption behaviors on Ar ion-irradiated GaN surface

〇Masaki Hasegawa¹, Takayoshi Tsutsumi¹, Atsushi Tanide^1,2, Hiroki Kondo¹, Makoto Sekine¹, Kenji Ishikawa¹, Masaru Hori¹ (1.Nagoya Univ., 2.SCREEN Holdings Co., Ltd.)

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