Takahiro Yamasaki

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 6:45 PM 223 (223)

Symposium (Oral)
| Symposium
| Current status and future prospect of atomic layer processes

[20p-223-1~11] Current status and future prospect of atomic layer processes

3:30 PM - 3:45 PM

[20p-223-4] Abilities and issues of first-principles calculations for elucidation of surface reactions in atomic layer processing

〇Takahiro Yamasaki¹ (1.Osaka Univ.)