Hiroyuki Kuwae

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:45 PM - 6:45 PM 223 (223)

Symposium (Oral)
| Symposium
| Current status and future prospect of atomic layer processes

[20p-223-1~11] Current status and future prospect of atomic layer processes

3:45 PM - 4:00 PM

△ [20p-223-5] Low tempreture Quasi-direct Bonding of Cu-Cu with Ultrathin Platinum Intermediate Layer Deposited by Atomic Layer Deposition

〇(DC)Hiroyuki Kuwae¹, Kosuke Yamada¹, Takumi Kamibayashi¹, Wataru Momose², Shuichi Shoji¹, Jun Mizuno¹ (1.Waseda Univ., 2.ALD Jaan)