Shinichi Matsubara

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Speaker, Author, Co-Author

Thu. Sep 20, 2018 1:30 PM - 6:00 PM 233 (233)

Symposium (Oral)
| Symposium
| Advanced ion microscopy for future nanoelectronics materials and devices

[20p-233-1~10] Advanced ion microscopy for future nanoelectronics materials and devices

4:15 PM - 4:45 PM

▲ [20p-233-7] Energy Analysis of H₃⁺ Ion Beam Emitted from Gas field ionization source

〇Shinichi Matsubara¹, Hiroyasu Shichi¹, Tomihiro Hashizume¹, Anto Yasaka² (1.Hitachi, Ltd., 2.Hitachi High-Tech Science Co.)