Haruki Kai

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 9:00 AM - 11:45 AM 135 (135)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21a-135-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

11:30 AM - 11:45 AM

[21a-135-10] Temperature control of clean room by dynamic simulation and virtual metrology

〇Haruki Kai¹, Abe Narumi¹, Kumagae Yuki¹, Iwamura Ko², Kubota Hiroshi¹, Hashishin Takeshi¹, Yoshioka Masao² (1.GSST Kumamoto Univ., 2.Kumamoto Univ.)