Fumikazu Mizutani

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 9:00 AM - 12:00 PM 222 (222)

Oral presentation
| 6 Thin Films and Surfaces
| 6.3 Oxide electronics

[21a-222-1~11] 6.3 Oxide electronics

11:00 AM - 11:15 AM

[21a-222-8] Atomic Layer Deposition of Gallium Oxide Thin Films Using a New Precursor “GaCp*”

〇Fumikazu Mizutani¹, Higashi Shintaro¹, Inoue Mari², Nabatame Toshihide² (1.Kojundo Chem. Lab., 2.NIMS)