Takahiro Kanai

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 1:00 PM - 5:15 PM 135 (135)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21p-135-1~16] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

4:00 PM - 4:15 PM

[21p-135-12] Development of Alkaline Solution generated by Electrolysis of Organic Ammonium Salt for Wet and Cleaning Process in Semiconductor Manufacturing
-Elucidation of hypochlorite ion decomposition reaction mechanism by organic cation species-

〇Takahiro Kanai¹, Yuuji Nagashima¹, Hideaki Hirabayashi², Masaaki Hirakawa³ (1.Shibaura mechatronics Corp., 2.Toshiba Materials Co.,Ltd., 3.Toshiba Corp.)

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