Koichi Masuya

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 1:00 PM - 5:15 PM 135 (135)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21p-135-1~16] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

4:30 PM - 4:45 PM

[21p-135-14] Analysis of adhesion behavior of a silica abrasive grain to silicon oxide film by molecular dynamics simulations

〇Koichi Masuya¹, Masashi Obuchi¹, Satomi Hamada¹, Masuhiro Mikami², Chikako Takatoh¹ (1.Ebara Corp., 2.Keio Univ.)