Miya Matsuo

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 1:00 PM - 5:15 PM 135 (135)

Oral presentation
| 13 Semiconductors
| 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

[21p-135-1~16] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

5:00 PM - 5:15 PM

[21p-135-16] Water Flow Recirculation Design in Batch-Type Silicon Wafer Wet Cleaner

〇Miya Matsuo¹, Kento Miyazaki¹, Shogo Okuyama¹, Hitoshi Habuka¹, Akihiro Goto² (1.Yokohama Nat. Univ., 2.Pre-Tech)