Haruki Iwatsuka

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 1:15 PM - 5:00 PM 145 (Reception Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[21p-145-1~14] 13.3 Insulator technology

4:15 PM - 4:30 PM

[21p-145-12] Capacitance-voltage characteristics of HfO₂ MIM capacitors with Si incorporation

〇(B)Haruki Iwatsuka¹, Takuya Hosii¹, Iriya Muneta¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui¹, Kuniyuki Kakushima¹ (1.Tokyo Inst.)