Takeshi Tokorozuki

→ Search for Takeshi Tokorozuki in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 21, 2018 1:15 PM - 5:00 PM 145 (Reception Hall)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[21p-145-1~14] 13.3 Insulator technology

2:15 PM - 2:30 PM

[21p-145-5] Fabrication and evaluation of HfO₂/Ge structure using Kr/O₂ plasma oxidation method

〇(M1)Takeshi Tokorozuki¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.TUAT)