Noriko Miura

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 1:00 PM - 4:45 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[21p-233-1~14] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:15 PM - 1:30 PM

[21p-233-2] Development of Minimal Ion Implantation Tool

〇Noriko Miura¹, Naoki Hashimoto^1,2, Yoshitaka Kitamura^1,2, Fumito Imura^1,3, Kazushige Sato¹, Kazuhiro Koga¹, Yuuki Ishida^1,3, Toshiyuki Oodaira^1,3, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.MINIMAL, 2.FUJI IMVAC, 3.AIST)

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