Koichi Morikawa

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Speaker, Author, Co-Author

Fri. Sep 21, 2018 1:00 PM - 4:45 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[21p-233-1~14] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

1:45 PM - 2:00 PM

[21p-233-4] Fabrication of 2-input NAND gate by Minimal TiN SOI-CMOS process

〇Koichi Morikawa¹, Kozo Takeuchi¹, Yasushi Igarashi¹, Hiroyuki Shindo¹, Somawan Khumpuang², Shiro Hara² (1.JAXA, 2.AIST)