Reo Kometani

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Chairperson, etc.

Thu. Sep 20, 2018 1:30 PM - 6:00 PM 233 (233)

Symposium (Oral)
| Symposium
| Advanced ion microscopy for future nanoelectronics materials and devices

[20p-233-1~10] Advanced ion microscopy for future nanoelectronics materials and devices

Reo Kometani(Univ. of Tokyo), Shinichi Ogawa(AIST)

Wed. Sep 19, 2018 9:00 AM - 12:00 PM 233 (233)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[19a-233-1~11] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Reo Kometani(Univ. of Tokyo)