〇Kentaro Kutsukake¹, Kenichi Inoue¹, Takashi Segi², Takefumi Kamioka³, Takuo Sasaki⁴, Seiji Fujikawa⁴, Masamitu Takahashi⁴ (1.Nagoya Univ., 2.Kobelco Research Institute, Inc., 3.Toyota Technol. Inst., 4.QST)

〇Kentaro Suzuki¹, Jun Otani¹, Shingo Ono¹, Masahiko Kase² (1.NITech, 2.USHIO INC.)

〇Hiroaki Ito¹, Shusaku Terakawa¹, Miho Tanaka¹, Singo Ono¹, Akihiro Yamaji², Shunsuke Kurosawa², Akira Yoshikawa² (1.Nagoya Institute of Technology, 2.Tohoku Univ.)

〇Shusaku Terakawa¹, Shingo Ono¹, Marilou Cadatal-Raduban², Minh Hong Pham³, Takaya Taniguchi⁴, Kohei Yamanoi⁴, Takafumi Hirata⁵ (1.Nagoya Institute of Technology, 2.Massey Univ., 3.VAST, 4.Osaka Univ., 5.Tokyo Univ.)

〇Hidekazu Yamamoto¹, Yuki Honma¹, Yuki Ogura¹, Seigo Ohno^2,3, Hiroaki Minamide², Hiromasa Ito² (1.Chiba Inst. of Tech., 2.RIKEN, 3.Tohoku Univ.)

〇Yuuki Uchida¹, Mizuki Nakajima¹, Nobuo Satoh¹, Hidekazu Yamamoto¹ (1.Chiba Inst. of Tech)

〇Hiroshi Kaneta¹, Ichiro Omura¹ (1.Kyushu Inst. of Tech.)

〇Takahiro Maeta¹, Susumu Maeda¹, Moriya Miyashita¹, Masao Yoshioka², Shotaro Kuzukawa³, Hiroki Matsuyama³, Kazuhiro Kobayashi³, Takeshi Hashishin³, Hiroshi Kubota³ (1.GlobalWafers Japan, 2.Faculty of Engineering Kumamoto Univ., 3.GSST Kumamoto Univ.)

〇Koun Shirai¹, Takayoshi Fujimura¹ (1.ISIR, Osaka Univ.)

〇Kouji Sueoka¹ (1.Okayama Pref. Univ.)

〇Akito Hara¹, Teruyoshi Awano¹ (1.Tohoku Gakuin Univ.)