Takahiro Maeta

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Speaker, Author, Co-Author

Wed. Sep 19, 2018 9:00 AM - 12:00 PM 131 (131+132)

Oral presentation
| 15 Crystal Engineering
| 15.7 Crystal characterization, impurities and crystal defects

[19a-131-1~11] 15.7 Crystal characterization, impurities and crystal defects

11:00 AM - 11:15 AM

[19a-131-8] 【Highlighted Presentation】Evaluation of Gettering Efficiency in Silicon Wafer by Pulse Photoconductivity Method

〇Takahiro Maeta¹, Susumu Maeda¹, Moriya Miyashita¹, Masao Yoshioka², Shotaro Kuzukawa³, Hiroki Matsuyama³, Kazuhiro Kobayashi³, Takeshi Hashishin³, Hiroshi Kubota³ (1.GlobalWafers Japan, 2.Faculty of Engineering Kumamoto Univ., 3.GSST Kumamoto Univ.)

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