[18a-143-1~9] 6.6 Probe Microscopy

[18a-143-5] Development of a fine material deposition technique using a scanning nanopipette probe microscope capable of irradiating localized atmospheric pressure plasma jet

〇Sho Yamamoto¹, Daisuke Morimatsu¹, Masaru Shimomura¹, Akihisa Ogino¹, Masaaki Nagatsu², Futoshi Iwata^1,2 (1.Graduate school of Engineering, Shizuoka Univ., 2.Research Institute of Electronics, Shizuoka Univ.)

Keywords:Atmospheric pressure plasma jet, Fine material deposition technique, Nanopipette