[18a-143-1~9] 6.6 Probe Microscopy

[18a-143-8] Measurement of carrier density distribution by dissipative force modulation scanning capacitance force microscopy

〇(DC)Takeshi Uruma¹, Nobuo Satoh², Hidekazu Yamamoto², Futoshi Iwata¹ (1.Graduate School of Sci. and Tech., Shizuoka Univ., 2.Chiba. Ins. of Tech.)

Keywords:dissipative force modulation