[18a-224B-1~10] 17.3 Layered materials

△ [18a-224B-8] Evaluation of Physical Structure of MoS_2(1-x)Te_2x Fabricated via co-Sputtering and Sulfurization

〇Yusuke Hibino^1,4, Seiya Ishihara^1,4, Yuya Oyanagi¹, Naomi Sawamoto¹, Kentarou Matsuura², Hideaki Machida³, Masato Ishikawa³, Hiroshi Sudoh³, Hitoshi Wakabayashi², Atsushi Ogura¹ (1.Meiji Univ., 2.Tokyo Tech., 3.Gas Phase Growth Ltd., 4.JSPS Research Fellow)

Keywords:transition metal dichalcogenide, alloy

Recently, layered materials, especially transition metal dichalcogenides are drawing more and more attention. One reason that drives the research forward is its tunability of physical properties. Among those property-tuning methods, we have been focusing on fabricating alloys and controlling its composition. So far, we have reported the fabrication of MoS_2(1-x)Te_2x by co-sputtering and sulfurization. In this study, we will report the evaluation of the physical structure of the MoS_2(1-x)Te_2x alloy.