The 79th JSAP Autumn Meeting, 2018

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Oral presentation

15 Crystal Engineering » 15.5 Group IV crystals and alloys

[18a-235-1~9] 15.5 Group IV crystals and alloys

Tue. Sep 18, 2018 9:30 AM - 11:45 AM 235 (3Ｆ_Lounge２)

Kentarou Sawano(Tokyo City Univ.)

11:30 AM - 11:45 AM

[18a-235-9] Precursor heating deposition effects on solid-phase crystallization of Sb-doped Ge and Si thin films

〇Daichi Takahara1, Takashi Suemasu1, Kaoru Toko1 (1.Univ. of Tsukuba)

Keywords:Solid-phase crystallization, Germanium, Silicon