[18p-136-1~15] 3.7 Laser processing

[18p-136-2] Development of Pulse-Width-Controlled Laser Processing System

〇Hideyuki Takada¹, Dai Yoshitomi¹, Aiko Narazaki¹, Kenji Torizuka¹, Yohei Kobayashi² (1.AIST, 2.ISSP Univ. Tokyo)

Keywords:laser processing, femtosecond laser, automatic laser processing and measurement

In order to search optimum machining parameters efficiently in a short time from the enormous parameter region in laser processing, it is useful to construct a system that can collectively and automatically process from processing to measurement at variable parameters. Therefore, to search for the boundary region between thermal and nonthermal processing, we have developed a laser processing system, that controls the laser system capable of varying the pulse width from femtosecond to picosecond, a processing machine and an observation system simultaneously.