[18p-136-1~15] 3.7 Laser processing

△ [18p-136-5] Femtosecond laser processing inside AlN single crystal

〇(M1)Katsunari Matsui¹, Masahiro Shimizu¹, Yasuhiko Shimotsuma¹, Kiyotaka Miura¹ (1.Material Chemistry.Graduate School of Engneering.Kyoto Univ)

Keywords:Aluminum nitride, femtosecond laser

Aluminum nitride (AlN) crystals are promising wide gap semiconductor materials for deep ultraviolet light emitting devices. We have investigated optical processing using femtosecond laser pulses as the light source for the SiC crystal substrate which is difficult processing material so far and clarified that the elongation of the processing trace in the laser propagation direction is suppressed. In this research, for the purpose of light processing of AlN crystal by femtosecond laser, We evaluated photoinduced structure inside AlN crystal with different impurity concentration.