The 79th JSAP Autumn Meeting, 2018

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[18p-PA2-1~20] 6.4 Thin films and New materials

Tue. Sep 18, 2018 1:30 PM - 3:30 PM PA (Event Hall)

1:30 PM - 3:30 PM

[18p-PA2-10] Crystal Structure and Electrical Characteristics for MoSi2-Si Composite Thin Films Deposited by Radio Frequency Magnetron Sputtering

Shungo Tanimoto1, Yuuki Sato1, Tadashi Ohachi1, Shinzo Yoshikado1 (1.Doshisha Univ.)

Keywords:MoSi2-Si