Shungo Tanimoto

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Speaker, Author, Co-Author

Tue. Sep 18, 2018 1:30 PM - 3:30 PM PA (Event Hall)

Poster presentation
| 6 Thin Films and Surfaces
| 6.4 Thin films and New materials

[18p-PA2-1~20] 6.4 Thin films and New materials

1:30 PM - 3:30 PM

[18p-PA2-10] Crystal Structure and Electrical Characteristics for MoSi₂-Si Composite Thin Films Deposited by Radio Frequency Magnetron Sputtering

〇Shungo Tanimoto¹, Yuuki Sato¹, Tadashi Ohachi¹, Shinzo Yoshikado¹ (1.Doshisha Univ.)