The 79th JSAP Autumn Meeting, 2018

Presentation information

Print

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[18p-PA2-1~20] 6.4 Thin films and New materials

Tue. Sep 18, 2018 1:30 PM - 3:30 PM PA (Event Hall)

1:30 PM - 3:30 PM

[18p-PA2-17] Electromechanical coupling kt2 of c-axis oriented CrAlN films grown by sputtering deposition

〇Masashi Suzuki1, Ryusei Hayakawa1, Shoji Kakio1 (1.Univ. of Yamanashi)

Keywords:AlN film, piezoelectricity, Electromechanical coupling