[18p-PA4-1~20] 3.8 Optical measurement, instrumentation, and sensor

[18p-PA4-14] Effect of Fluorine Desorption of Cerium Fluoride Thin Film on Optical Sensor Characteristics

〇Seiya Kato¹, Kentaro Suzuki¹, Jun Otani¹, Shingo Ono¹, Masahiko Kase² (1.Nagoya Institute of Technology, 2.USHIO INC.)

Keywords:ultraviolet sensor, fluoride, pulsed laser deposition