[18p-PA6-1~30] 13.7 Compound and power electron devices and process technology

[18p-PA6-28] Evaluation of Thermal Resistance of GaN-on-Diamond Substrate

〇Koji Yoshitsugu¹, Takashi Matsuda¹, Keisuke Nakamura¹, Eiji Yagyu¹, Mikio Yamamuka¹ (1.Mitsubishi Electric Corp.)

Keywords:GaN-on-Diamond, Thermal Resistance