11:45 AM - 12:00 PM
[19a-131-11] Ground-State of Ultrashallow Thermal Donors in Si Crystals
Keywords:silicon, impurity, defect
Presentation information
Oral presentation
15 Crystal Engineering » 15.7 Crystal characterization, impurities and crystal defects
[19a-131-1~11] 15.7 Crystal characterization, impurities and crystal defects
Wed. Sep 19, 2018 9:00 AM - 12:00 PM 131 (131+132)
Kazuhisa Torigoe(SUMCO), Takuo Sasaki(QST)