[19a-224A-1~8] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[19a-224A-1] Selective growth and micro patterning of β-Ga₂O₃ thin film by water lift off process and its characterization

〇Satoshi Itoh¹, Tomoaki Arashi¹, Takeshi Kawae¹ (1.Kanazawa Univ.)

Keywords:Gallium oxide, selective growth, process