9:30 AM - 9:45 AM
[19a-224A-1] Selective growth and micro patterning of β-Ga2O3 thin film by water lift off process and its characterization
Keywords:Gallium oxide, selective growth, process
Oral presentation
21 Joint Session K » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"
Wed. Sep 19, 2018 9:30 AM - 11:30 AM 224A (224-1)
Takumi Ikenoue(Kyoto Univ.)
9:30 AM - 9:45 AM
Keywords:Gallium oxide, selective growth, process