The 79th JSAP Autumn Meeting, 2018

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Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[19p-133-1~19] 6.1 Ferroelectric thin films

Wed. Sep 19, 2018 1:45 PM - 7:00 PM 133 (133+134)

Tomoaki Yamada(Nagoya Univ.), Takeshi Yoshimura(Osaka Pref. Univ.), Takashi Eshita(Wakayama Univ.), Hiroshi Naganuma(Tohoku Univ.)

1:45 PM - 2:00 PM

[19p-133-1] [Young Scientist Presentation Award Speech] Polarization control of ScAlN, ZnO and PZT-based thin films for polarity inverted resonators

〇Takahiro Shimidzu1,2, Takahiko Yanagitani1,2,3 (1.Waseda Univ., 2.ZAIKEN, 3.JST PRESTO)

Keywords:PZT, ScAlN, ZnO