The 79th JSAP Autumn Meeting, 2018

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3 Optics and Photonics » 3.14 Optical control devices and optical fibers

[19p-212A-1~11] 3.14 Optical control devices and optical fibers

Wed. Sep 19, 2018 1:15 PM - 4:30 PM 212A (212-1)

Hideki Ishizuki(IMS), Atsushi Wada(National Defence Academy), Toshio Watanabe(Kagoshima Univ.)

3:00 PM - 3:15 PM

[19p-212A-7] Room-temperature wafer bonding of LiNbO3 and SiO2 using Si nanoadhesive layer for low-loss LNOI waveguide application

〇Ryo Takigawa1, Tanemasa Asano1 (1.Kyushu Unv.)

Keywords:Room-temperature wafer bonding, LNOI/Si hybrid wafer, low-loss LNOI waveguide