[19p-PA2-1~6] 1.3 Novel technologies and interdisciplinary engineering

▲ [19p-PA2-3] Heating equipment with carbon heating used to activate silicon and fabricate its solar cells

〇Toshitaka Kikuchi¹, Takashi Sugawara¹, Takuma Uehara¹, Tomoyoshi Miyazaki^1,2, Go Kobayashi³, Masahiko Hasumi¹, Toshiyuki Sameshima¹ (1.TUAT, 2.Techno Research, 3.Orc manufacturing)

Keywords:activation, microwave, carbon