[19p-PA4-1~27] 15.4 III-V-group nitride crystals

[19p-PA4-13] Thermodynamic analysis of group-３ nitrides during metalorganic vapor phase epitaxy growth: Effect of semipolar surfaces

〇Yuki Seta¹, Pradipt Abdul-Muizz¹, Toru Akiyama¹, Kohji Nakamura¹, Tomonori Ito¹, Akira Kusaba², Yoshihiro Kangawa^2,3 (1.Mie Univ., 2.Kyushu Univ., 3.RIAM, Kyushu Univ.)

Keywords:Nitride semiconductor, Thermodynamic analysis, Semipolar planes