[19p-PA4-1~27] 15.4 III-V-group nitride crystals

[19p-PA4-21] Prediction of GaN MOVPE Crystal Growth Simulation Results by Machine Learning

〇Takumi Tomizawa¹, Kento Kawakami², Yosuke Tsunooka², Masaaki Araidai³, Naoya Okamoto², Shunta Harada³, Katsunori Yoshimatsu³, Toru Ujihara³, Kenji Shiraisi³ (1.Department of Eng., Nagoya Univ., 2.Grad. Sch. of Eng., Nagoya Univ., 3.IMaSS, Nagoya Univ.)

Keywords:machine learning, GaN, MOVPE