[19p-PA5-1~14] 16.3 Bulk, thin-film and other silicon-based solar cells

[19p-PA5-10] A study on preparation of ZnO antireflection films onto textured silicon surfaces by a mist coating method

Takafumi Sugano¹, Rina Sasaki¹, Takahiro Watanabe¹, Takahiro Himuro¹, 〇Yoji Saito¹, Masami Kawahara² (1.Seikei Univ., 2.Kojundo Chem. Lab.)

Keywords:silicon solar cells, anti-reflection film, texturing

ZnO antireflection films were deposited onto textured silicon surfaces by a mist coating method.