[19p-PB1-1~37] 6.3 Oxide electronics

[19p-PB1-8] Fabrication and in-situ characterization for all-solid-state thin-film batteries

〇Susumu Shiraki¹ (1.Nippon Inst. Tech.)

Keywords:thin film, all-solid-state battery, vacuum

All-solid-state lithium batteries using an inorganic solid-electrolyte are expected to become next-generation batteries owing to their safety, large capacity, and high energy density compared with present lithium-ion batteries based on liquid organic electrolytes. One of the largest drawbacks for the practical use of all-solid-state batteries is the large internal resistance at the solid-electrolyte and electrode interfaces. Recent progress in thin-film deposition techniques of electrodes and solid-electrolytes has made it possible to fabricate all-solid-state thin-film batteries with atomically controlled interfaces. In this study, we report fabrication and in-situ characterization of clean and well-defined solid-electrolyte/electrode interfaces in thin-film lithium batteries using an all-in-vacuum system.