[19p-PB8-1~23] 21 Joint Session K (Poster)

[19p-PB8-1] alpha-Ga₂O₃ ultraviolet photodetector and its two-photon absorption characteristics

〇Kazuyuki Uno¹, Chisato Umemura¹, Sachi Nakamura¹, Ichiro Tanaka¹ (1.Wakayama Univ.)

Keywords:gallium oxide, UV photo detector, mist chemical vapor deposition

A MSM-type ultraviolet photodetector was fabricated using an alpha-Ga₂O₃ thin film. This device was sensitive to VIS light as well as UV light. We experimentally examined that two-photon absorption causes the sensitivity of alpha-Ga2O3 to blue-to-near-UV region light.